发明授权
- 专利标题: NOR flash memory device and method for fabricating the same
- 专利标题(中): NOR闪存器件及其制造方法
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申请号: US12189955申请日: 2008-08-12
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公开(公告)号: US08164955B2公开(公告)日: 2012-04-24
- 发明人: Sung Kun Park
- 申请人: Sung Kun Park
- 申请人地址: KR Seoul
- 专利权人: Dongbu Hitek Co., Ltd.
- 当前专利权人: Dongbu Hitek Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Saliwanchik, Lloyd & Eisenschenk
- 优先权: KR10-2007-0081597 20070814
- 主分类号: G11C11/34
- IPC分类号: G11C11/34
摘要:
Embodiments of a NOR flash memory and method for fabricating the same are provided. Bit lines can be formed as self-aligned source and drain regions between adjacent first polysilicon patterns. Contacts for the source and drain regions can be provided according to bit line instead of per cell. Word lines can be formed as second polysilicon patterns, which are used as control gates, and are provided perpendicular to the longitudinal axis of the bit lines. During formation of the second polysilicon patterns, a dielectric film and exposed regions of the first polysilicon patterns can be etched to form floating gates below the second polysilicon patterns.
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