发明授权
US08164955B2 NOR flash memory device and method for fabricating the same 有权
NOR闪存器件及其制造方法

NOR flash memory device and method for fabricating the same
摘要:
Embodiments of a NOR flash memory and method for fabricating the same are provided. Bit lines can be formed as self-aligned source and drain regions between adjacent first polysilicon patterns. Contacts for the source and drain regions can be provided according to bit line instead of per cell. Word lines can be formed as second polysilicon patterns, which are used as control gates, and are provided perpendicular to the longitudinal axis of the bit lines. During formation of the second polysilicon patterns, a dielectric film and exposed regions of the first polysilicon patterns can be etched to form floating gates below the second polysilicon patterns.
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