Invention Grant
US08164066B2 Magnetic lens, method for focusing charged particles and charged particle energy analyzer
有权
磁性透镜,用于聚焦带电粒子和带电粒子能量分析仪的方法
- Patent Title: Magnetic lens, method for focusing charged particles and charged particle energy analyzer
- Patent Title (中): 磁性透镜,用于聚焦带电粒子和带电粒子能量分析仪的方法
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Application No.: US12837857Application Date: 2010-07-16
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Publication No.: US08164066B2Publication Date: 2012-04-24
- Inventor: Bryan Barnard , Christopher Glenister
- Applicant: Bryan Barnard , Christopher Glenister
- Applicant Address: GB Cambridge
- Assignee: VG Systems Limited
- Current Assignee: VG Systems Limited
- Current Assignee Address: GB Cambridge
- Agent Charles B. Katz
- Priority: GB0912332.4 20090716
- Main IPC: H01J37/145
- IPC: H01J37/145 ; H01J37/14 ; G21K5/10

Abstract:
The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece disposed about the central pole piece, wherein the lens comprises a magnetic moveable element for movement relative to at least one of the pole pieces, whereby a focal length of the lens is variable by said movement of the magnetic moveable element, thereby enabling a zoom facility for changing the magnification of an image. The movement of the moveable element preferably changes the magnetic circuit between the pole pieces. Also provided is a method of focusing charged particles emitted from a sample and a charged particle energy analyzer, such as an imaging photoelectron spectroscopy system.
Public/Granted literature
- US20110012018A1 Magnetic Lens, Method for Focusing Charged Particles and Charged Particle Energy Analyzer Public/Granted day:2011-01-20
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