Invention Grant
US08164066B2 Magnetic lens, method for focusing charged particles and charged particle energy analyzer 有权
磁性透镜,用于聚焦带电粒子和带电粒子能量分析仪的方法

Magnetic lens, method for focusing charged particles and charged particle energy analyzer
Abstract:
The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece disposed about the central pole piece, wherein the lens comprises a magnetic moveable element for movement relative to at least one of the pole pieces, whereby a focal length of the lens is variable by said movement of the magnetic moveable element, thereby enabling a zoom facility for changing the magnification of an image. The movement of the moveable element preferably changes the magnetic circuit between the pole pieces. Also provided is a method of focusing charged particles emitted from a sample and a charged particle energy analyzer, such as an imaging photoelectron spectroscopy system.
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