发明授权
- 专利标题： Chlorine, fluorine and lithium co-doped transparent conductive films and methods for fabricating the same
- 专利标题（中）： 氯，氟和锂共掺杂的透明导电膜及其制造方法
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申请号： US12260466申请日： 2008-10-29
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公开(公告)号： US08163404B2公开(公告)日： 2012-04-24
- 发明人: Syh-Yuh Cheng , Chia-Hsin Lin , Chin-Ching Lin , Mei-Ching Chiang
- 申请人： Syh-Yuh Cheng , Chia-Hsin Lin , Chin-Ching Lin , Mei-Ching Chiang
- 申请人地址： TW
- 专利权人： Industrial Technology Research Institute
- 当前专利权人： Industrial Technology Research Institute
- 当前专利权人地址： TW
- 代理机构： Lowe Hauptman Ham & Berner, LLP
- 优先权： TW96149874A 20071225
- 主分类号： C23C16/40
- IPC分类号： C23C16/40 ; C23C16/448 ; B32B9/04
摘要：
A chlorine, fluorine and lithium co-doped transparent conductive film is provided, including chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %.
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