发明授权
US08157876B2 Slurry composition containing non-ionic polymer and method for use
有权
含非离子聚合物的浆料组合物及其使用方法
- 专利标题: Slurry composition containing non-ionic polymer and method for use
- 专利标题(中): 含非离子聚合物的浆料组合物及其使用方法
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申请号: US12317254申请日: 2008-12-19
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公开(公告)号: US08157876B2公开(公告)日: 2012-04-17
- 发明人: Steven Grumbine , Chul Woo Nam , William Ward , Ramasubramanyam Nagarajan
- 申请人: Steven Grumbine , Chul Woo Nam , William Ward , Ramasubramanyam Nagarajan
- 申请人地址: US IL Aurora
- 专利权人: Cabot Microelectronics Corporation
- 当前专利权人: Cabot Microelectronics Corporation
- 当前专利权人地址: US IL Aurora
- 代理商 Thomas E. Omholt; Robert J. Ross; Steven D. Weseman
- 主分类号: B24D3/02
- IPC分类号: B24D3/02 ; C09C1/68 ; C09K3/14 ; C09C1/02 ; C10M169/00 ; C10M173/00
摘要:
A wiresaw cutting fluid composition of the present invention comprises about 25 to about 75% by weight of a particulate abrasive suspended in an aqueous carrier containing a polymeric viscosity modifier that comprises a polymer including a majority of non-ionic monomer units (preferably 100 mol % non-ionic monomer units), has a number average molecular weight (Mn) of at least about 5 kDa, and is present in the composition at a concentration sufficient to provide a Brookfield viscosity for the composition in the range of about 50 to about 1000 cP, e.g., 50 to about 700 cP, at about 25° C. at a spindle rotation rate of about 60 rpm. In one embodiment, the viscosity modifier comprises a polymer having a weight average molecular weight (Mw) of at least about 200 kDa. When a viscosity modifier of 200 kDa or greater Mw is utilized, a preferred wiresaw cutting method the cutting fluid is circulated and applied by pumps and nozzles operating at a relatively low shear rate of not more than about 104 s−1.
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