Invention Grant
US08147630B2 Method and apparatus for wafer bonding with enhanced wafer mating
有权
具有增强的晶片配合的晶片接合的方法和装置
- Patent Title: Method and apparatus for wafer bonding with enhanced wafer mating
- Patent Title (中): 具有增强的晶片配合的晶片接合的方法和装置
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Application No.: US12618846Application Date: 2009-11-16
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Publication No.: US08147630B2Publication Date: 2012-04-03
- Inventor: Gregory George
- Applicant: Gregory George
- Applicant Address: DE Garching
- Assignee: Suss Microtec Lithography, GmbH
- Current Assignee: Suss Microtec Lithography, GmbH
- Current Assignee Address: DE Garching
- Agency: AKC Patents LLC
- Agent Aliki K. Collins
- Main IPC: B32B41/00
- IPC: B32B41/00

Abstract:
An improved wafer-to-wafer bonding method includes aligning an upper and a lower wafer and initiating a bond at a single point by applying pressure to a single point of the upper wafer via the flow of pressurized gas through a port terminating at the single point. The bond-front propagates radially across the aligned oppositely oriented wafer surfaces at a set radial velocity rate bringing the two wafer surfaces into full atomic contact by controlling the gas pressure and/or controlling the velocity of the motion of the lower wafer up toward the upper wafer.
Public/Granted literature
- US20100122762A1 METHOD AND APPARATUS FOR WAFER BONDING WITH ENHANCED WAFER MATING Public/Granted day:2010-05-20
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