Invention Grant
US08146236B1 Method for providing a perpendicular magnetic recording (PMR) transducer
有权
提供垂直磁记录(PMR)传感器的方法
- Patent Title: Method for providing a perpendicular magnetic recording (PMR) transducer
- Patent Title (中): 提供垂直磁记录(PMR)传感器的方法
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Application No.: US12057692Application Date: 2008-03-28
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Publication No.: US08146236B1Publication Date: 2012-04-03
- Inventor: Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
- Applicant: Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: G11B5/127
- IPC: G11B5/127 ; H04R31/00

Abstract:
A method and system for providing a perpendicular magnetic recording (PMR) transducer from pole layer(s) are disclosed. First and second planarization stop layers are provided on the pole layer(s). A mask is provided on the second planarization stop layer. A first portion of the mask resides on a portion of the pole layer(s) used to form the PMR pole. The PMR pole is defined after the mask is provided. An intermediate layer surrounding at least the PMR pole is provided. A first planarization is performed on at least the intermediate layer. A portion of the second planarization stop layer is removed during the first planarization. A remaining portion of the second planarization stop layer is removed. A second planarization is performed. A portion of the first planarization stop layer remains after the second planarization. A write gap and shield are provided on the PMR pole and write gap, respectively.
Information query
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