发明授权
- 专利标题： Electrostatic holding apparatus, vacuum environmental apparatus using it and joining apparatus
- 专利标题（中）： 静电保持装置，使用它的真空环境装置和接合装置
-
申请号： US12224859申请日： 2007-03-09
-
公开(公告)号： US08125756B2公开(公告)日： 2012-02-28
- 发明人: Fow-Lai Poh
- 申请人： Fow-Lai Poh
- 申请人地址： JP Kawachi-gun
- 专利权人： Tsukuba Seiko Ltd.
- 当前专利权人： Tsukuba Seiko Ltd.
- 当前专利权人地址： JP Kawachi-gun
- 代理机构： Oliff & Berridge, PLC
- 优先权： JP2006-064020 20060309
- 国际申请： PCT/JP2007/054642 WO 20070309
- 国际公布： WO2007/102598 WO 20070913
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01T23/00
摘要：
An electrostatic holding apparatus is configured to electrostatically hold objects (W1, W2) to be held by applying a predetermined high voltage to a plurality of electrode groups (112a, 112b) as a holding part. A high-voltage generating part or high voltage generating source (114) to convert from a low voltage to a predetermined high voltage necessary to hold the objects electrostatically is disposed on each of electrode modules (110). The high-voltage generating part (114) is hermetically closed or sealed. The high-voltage generating part may include a voltage amplifying circuit. The high-voltage generating part may include a battery and a voltage amplifying circuit.
公开/授权文献
信息查询
IPC分类:
