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US08114520B2 Laser dicing sheet and process for producing chip body 有权
激光切割片及其制造方法

Laser dicing sheet and process for producing chip body
摘要:
An object of the present invention is to provide a laser dicing sheet which is capable of preventing cutting of dicing sheet by laser beam, damage of the chuck table and fusion of the dicing sheet to the chuck table.A laser dicing sheet according to the present invention comprising a base material comprising a polyurethane acrylate; and an adhesive layer formed on one surface thereof.
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