发明授权
- 专利标题: Displacement sensor
- 专利标题(中): 位移传感器
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申请号: US12712012申请日: 2010-02-24
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公开(公告)号: US08111407B2公开(公告)日: 2012-02-07
- 发明人: Hiroaki Takimasa , Takahiro Suga , Yoshihiro Yamashita
- 申请人: Hiroaki Takimasa , Takahiro Suga , Yoshihiro Yamashita
- 申请人地址: JP Kyoto
- 专利权人: Omron Corporation
- 当前专利权人: Omron Corporation
- 当前专利权人地址: JP Kyoto
- 代理机构: Foley & Lardner LLP
- 优先权: JP2009-061740 20090313
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
A displacement is accurately measured at high speed to a measurement object having various surface states. In a displacement sensor including a confocal optical system in which an objective lens is moved along an optical axis, light emitted from a laser diode is formed into a slit beam by a cylindrical lens, a Y-axis side orthogonal to the optical axis is narrowed such that the light is collected on a surface of a measurement object, and an X-axis orthogonal to the optical axis is elongated in order to average a component of the light reflected from the surface. A photodiode receives the light reflected from the surface of the measurement object through an opening disposed in a position of conjugation with the laser diode. The opening is formed into a slit shape that is short in the Y-axis while being long in the X-axis. The displacement of the surface is measured from a position of the objective lens when a light receiving signal becomes the maximum.
公开/授权文献
- US20100265519A1 DISPLACEMENT SENSOR 公开/授权日:2010-10-21
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