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US08045300B2 Tunneling magnetic sensing element and method for producing same 有权
隧道磁传感元件及其制造方法

Tunneling magnetic sensing element and method for producing same
Abstract:
A free magnetic layer has a laminated structure in which a first magnetic sublayer composed of Co—Fe or Fe and a second magnetic sublayer composed of Co—Fe—B or Fe—B are formed, in that order, on an insulating barrier layer composed of Mg—O. This effectively improves the rate of change in resistance (ΔR/R) compared with the related art.
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