发明授权
US08041518B2 Determining die test protocols based on process health 有权
基于过程健康确定模具测试方案

Determining die test protocols based on process health
摘要:
A method includes receiving a first set of parameters associated with a subset of a plurality of die on a wafer. A die health metric is determined for at least a portion of the plurality of die based on the first set of parameters. The die health metric includes at least one process component associated with the fabrication of the die and at least one performance component associated with an electrical performance characteristic of the die. At least one of the die is tested. A protocol of the testing is determined based on the associated die health metric.
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