发明授权
- 专利标题: Determining die test protocols based on process health
- 专利标题(中): 基于过程健康确定模具测试方案
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申请号: US11745688申请日: 2007-05-08
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公开(公告)号: US08041518B2公开(公告)日: 2011-10-18
- 发明人: Michael G. McIntyre , Kevin R. Lensing
- 申请人: Michael G. McIntyre , Kevin R. Lensing
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Williams, Morgan & Amerson, P.C.
- 主分类号: G01R15/00
- IPC分类号: G01R15/00
摘要:
A method includes receiving a first set of parameters associated with a subset of a plurality of die on a wafer. A die health metric is determined for at least a portion of the plurality of die based on the first set of parameters. The die health metric includes at least one process component associated with the fabrication of the die and at least one performance component associated with an electrical performance characteristic of the die. At least one of the die is tested. A protocol of the testing is determined based on the associated die health metric.
公开/授权文献
- US20080281545A1 DETERMINING DIE TEST PROTOCOLS BASED ON PROCESS HEALTH 公开/授权日:2008-11-13
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