发明授权
- 专利标题: Semiconductor integrated circuit
- 专利标题(中): 半导体集成电路
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申请号: US12469181申请日: 2009-05-20
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公开(公告)号: US08040728B2公开(公告)日: 2011-10-18
- 发明人: Kazuo Taguchi
- 申请人: Kazuo Taguchi
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2008-153961 20080612
- 主分类号: G11C16/04
- IPC分类号: G11C16/04 ; G11C11/34
摘要:
A semiconductor integrated circuit includes a non-volatile memory built into the semiconductor integrated circuit, the non-volatile memory electrically writing and erasing data and including a memory cell, the memory cell including: a selecting transistor controlled by a word line; an impurity diffused region formed inside a semiconductor substrate, the impurity diffused region being coupled to one of a source and a drain of the selecting transistor; a first electrode formed above the semiconductor substrate with an insulating film therebetween, the first electrode receiving a control signal and part of the first electrode having an opening; a second electrode formed above the first electrode so as to oppose the first electrode with an insulating film therebetween, the second electrode having a protrusion which opposes the impurity diffused region with a tunnel film therebetween and projects toward the semiconductor substrate through the opening of the first electrode, and storing information based on an applied voltage; and a sensing transistor operating based on charges accumulated in the second electrode, so as to sense the information stored in the memory cell.
公开/授权文献
- US20090310417A1 SEMICONDUCTOR INTEGRATED CIRCUIT 公开/授权日:2009-12-17
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