发明授权
US08039798B2 Dual-wavelength thermal infrared sensor 失效
双波长热红外传感器

  • 专利标题: Dual-wavelength thermal infrared sensor
  • 专利标题(中): 双波长热红外传感器
  • 申请号: US12496164
    申请日: 2009-07-01
  • 公开(公告)号: US08039798B2
    公开(公告)日: 2011-10-18
  • 发明人: Naoki Oda
  • 申请人: Naoki Oda
  • 申请人地址: JP Tokyo
  • 专利权人: NEC Corporation
  • 当前专利权人: NEC Corporation
  • 当前专利权人地址: JP Tokyo
  • 优先权: JP2008-178283 20080708
  • 主分类号: G01J5/00
  • IPC分类号: G01J5/00
Dual-wavelength thermal infrared sensor
摘要:
A dual-wavelength thermal infrared sensor includes a first and a second type pixels that detect infrared in different wavelength ranges. The pixels of both types include a diaphragm supported by beams, an eave formed to spread outward from the diaphragm, and reflection film on the substrate. The diaphragm includes a thermoelectric conversion material thin film, an electrode, and protective films. The protective films and eaves are made of a material having larger absorption coefficient for infrared in the first wavelength range and a smaller absorption coefficient for infrared in second wavelength range. First-type pixels further have metal thin films formed on the top of the diaphragm and eaves. First-type pixels have sensitivity to infrared in a first wavelength range and in a second wavelength range defined by optical interference occurring between the metal thin films and the reflection film. Second-type pixels have sensitivity to first wavelength range infrared.
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