发明授权
- 专利标题: Method for fabricating PIP capacitor
- 专利标题(中): 制造PIP电容的方法
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申请号: US12632115申请日: 2009-12-07
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公开(公告)号: US08039355B2公开(公告)日: 2011-10-18
- 发明人: Jong-Ho Lee
- 申请人: Jong-Ho Lee
- 申请人地址: KR Seoul
- 专利权人: Dongbu HiTek Co., Ltd.
- 当前专利权人: Dongbu HiTek Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Sherr & Vaughn, PLLC
- 优先权: KR10-2008-0134229 20081226
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
A PIP capacitor and methods thereof. A method of fabricating a PIP capacitor may include forming a field oxide film over a silicon substrate to define a device isolating region and/or an active region. A method of fabricating a PIP capacitor may include forming a lower polysilicon electrode having doped impurities on and/or over an field oxide film. A method of fabricating a PIP capacitor may include performing an oxidizing step to form a first oxide film over a polysilicon and/or a second oxide film on and/or over an active region. A method of fabricating a PIP capacitor may include forming an upper polysilicon electrode on and/or over a region of a first oxide film and forming a gate electrode on and/or over a second oxide film at substantially the same time. A method of fabricating a PIP capacitor may include forming a polysilicon resistor. A PIP capacitor is disclosed.
公开/授权文献
- US20100163947A1 METHOD FOR FABRICATING PIP CAPACITOR 公开/授权日:2010-07-01
信息查询
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