发明授权
US08022001B2 Aluminum nitride sintered product, method for producing the same, and electrostatic chuck including the same
有权
氮化铝烧结体及其制造方法以及包含该氮化铝烧结体的静电吸盘
- 专利标题： Aluminum nitride sintered product, method for producing the same, and electrostatic chuck including the same
- 专利标题（中）： 氮化铝烧结体及其制造方法以及包含该氮化铝烧结体的静电吸盘
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申请号： US12618901申请日： 2009-11-16
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公开(公告)号： US08022001B2公开(公告)日： 2011-09-20
- 发明人: Naomi Teratani , Toru Hayase , Yuji Katsuda
- 申请人： Naomi Teratani , Toru Hayase , Yuji Katsuda
- 申请人地址： JP Nagoya
- 专利权人： NGK Insulators, Ltd.
- 当前专利权人： NGK Insulators, Ltd.
- 当前专利权人地址： JP Nagoya
- 代理机构： Burr & Brown
- 优先权： JP2008-297438 20081121
- 主分类号： C04B35/581
- IPC分类号： C04B35/581
摘要：
A method for producing an aluminum nitride sintered product according to the present invention includes the steps of (a) preparing a powder mixture that contains AlN, 2 to 10 parts by weight of Eu2O3 with respect to 100 parts by weight of AlN, Al2O3 such that a molar ratio of Al2O3 to Eu2O3 is 2 to 10, and TiO2 such that a molar ratio of TiO2 to Al2O3 is 0.05 to 1.2, but not Sm; (b) producing a compact from the powder mixture; and (c) firing the compact by subjecting the compact to hot-press firing in a vacuum or in an inert atmosphere.
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