Invention Grant
- Patent Title: Reduction of electric-field-induced damage in field-sensitive articles
- Patent Title (中): 减少场敏感物品中的电场损伤
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Application No.: US12508042Application Date: 2009-07-23
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Publication No.: US08016114B2Publication Date: 2011-09-13
- Inventor: Gavin Charles Rider , Joseph A. Durben , Robert K. Lindsley
- Applicant: Gavin Charles Rider , Joseph A. Durben , Robert K. Lindsley
- Applicant Address: US CO Colorado Springs
- Assignee: Microtome Precision, Inc.
- Current Assignee: Microtome Precision, Inc.
- Current Assignee Address: US CO Colorado Springs
- Agency: Patton Boggs LLP
- Main IPC: B65D85/00
- IPC: B65D85/00

Abstract:
A continuously electrically-conductive container contains an electrically-insulating support for holding an electric-field-sensitive article, such as a reticle, so that the article is shielded from external electric fields and is not in electrical contact with a conductive container wall. A SMIF pod comprises an electrically conductive container for holding an electric-field-sensitive article. A system has boundary walls that form a chamber for a controlled environment. The system includes a load port for receiving a SMIF pod and an end effector made of insulating material for moving a field-sensitive article within the chamber to and from the SMIF pod. An ionizer neutralizes electric charges on the field-sensitive article.
Public/Granted literature
- US20090321306A1 REDUCTION OF ELECTRIC-FIELD-INDUCED DAMAGE IN FIELD-SENSITIVE ARTICLES Public/Granted day:2009-12-31
Information query
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