Invention Grant
- Patent Title: Membrane grating for beam steering device and method of fabricating same
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Application No.: US12804425Application Date: 2010-07-21
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Publication No.: US08014070B2Publication Date: 2011-09-06
- Inventor: Michael P. Nesnidal
- Applicant: Michael P. Nesnidal
- Applicant Address: US MN Burnsville
- Assignee: Rosemount Aerospace Inc,
- Current Assignee: Rosemount Aerospace Inc,
- Current Assignee Address: US MN Burnsville
- Agency: Edwards Angell Palmer & Dodge LLP
- Agent Scott D. Wofsy
- Main IPC: G02B5/18
- IPC: G02B5/18 ; G02B27/44 ; G02F1/13

Abstract:
A method of fabricating a membrane structure for a diffractive phased array assembly is provided. The method includes the steps of providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body, forming a grating pattern on a surface of the membrane layer, and forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane.
Public/Granted literature
- US20100296162A1 Membrane grating for beam steering device and method of fabricating same Public/Granted day:2010-11-25
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