发明授权
US07989848B2 Semiconductor device having at least four side-by-side electrodes of equal length and equal pitch with at least two transistor connections to power or ground
有权
具有至少四个具有相等长度和等间距的并排电极的半导体器件,至少两个晶体管连接到电源或接地
- 专利标题: Semiconductor device having at least four side-by-side electrodes of equal length and equal pitch with at least two transistor connections to power or ground
- 专利标题(中): 具有至少四个具有相等长度和等间距的并排电极的半导体器件,至少两个晶体管连接到电源或接地
-
申请号: US12561243申请日: 2009-09-16
-
公开(公告)号: US07989848B2公开(公告)日: 2011-08-02
- 发明人: Scott T. Becker , Michael C. Smayling
- 申请人: Scott T. Becker , Michael C. Smayling
- 申请人地址: US CA Los Gatos
- 专利权人: Tela Innovations, Inc.
- 当前专利权人: Tela Innovations, Inc.
- 当前专利权人地址: US CA Los Gatos
- 代理机构: Martine Penilla & Gencarella, LLP
- 主分类号: H01L27/10
- IPC分类号: H01L27/10
摘要:
A substrate portion of a semiconductor device is formed to include a plurality of diffusion regions that are defined in a non-symmetrical manner relative to a virtual line defined to bisect the substrate portion. A gate electrode level region is formed above the substrate portion to include a number of conductive features defined to extend in only a first parallel direction. Each of the number of conductive features within the gate electrode level region is fabricated from a respective originating rectangular-shaped layout feature. The conductive features within the gate electrode level region are defined along at least four different virtual lines of extent in the first parallel direction. A width size of the conductive features within the gate electrode level region is measured perpendicular to the first parallel direction and is less than a wavelength of light used in a photolithography process to fabricate the conductive features.
信息查询
IPC分类: