A second electrically-conductive terminal, having flexibility, contact with a first electrically-conductive terminal. A second substrate has first and second surfaces. The second surface supports the second electrically-conductive terminal. A third electrically-conductive terminal, having flexibility, is located on the first surface of the second substrate. The third electrically-conductive terminal is connected to the second electrically-conductive terminal. A fourth electrically-conductive terminal contacts with the third electrically-conductive terminal. A third substrate has a surface supporting the fourth electrically-conductive terminal. A frame is interposed between the first substrate and the third substrate. The frame supports the outer periphery of the second substrate. The frame allows relative movement of the second substrate in the direction perpendicular to the first surface of the second substrate.