发明授权
- 专利标题: Interferometer utilizing polarization scanning
- 专利标题(中): 干涉仪利用偏振扫描
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申请号: US12267077申请日: 2008-11-07
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公开(公告)号: US07978337B2公开(公告)日: 2011-07-12
- 发明人: Peter De Groot , Xavier Colonna De Lega
- 申请人: Peter De Groot , Xavier Colonna De Lega
- 申请人地址: US CT Middlefield
- 专利权人: Zygo Corporation
- 当前专利权人: Zygo Corporation
- 当前专利权人地址: US CT Middlefield
- 代理机构: Fish & Richardson P.C.
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G02B21/00
摘要:
In one aspect, the disclosure features methods that include using a microscope to direct light to a test object and to direct the light reflected from the test object to a detector, where the light includes components having orthogonal polarization states, varying an optical path length difference (OPD) between the components of the light, acquiring an interference signal from the detector while varying the OPD between the components, and determining information about the test object based on the acquired interference signal.
公开/授权文献
- US20090128827A1 INTERFEROMETER UTILIZING POLARIZATION SCANNING 公开/授权日:2009-05-21
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