发明授权
- 专利标题: Three wavelength quantitative imaging systems
- 专利标题(中): 三波长定量成像系统
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申请号: US12381758申请日: 2009-03-16
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公开(公告)号: US07978336B2公开(公告)日: 2011-07-12
- 发明人: Christopher J. Mann , Philip R. Bingham
- 申请人: Christopher J. Mann , Philip R. Bingham
- 申请人地址: US TN Oak Ridge
- 专利权人: UT-Battelle, LLC
- 当前专利权人: UT-Battelle, LLC
- 当前专利权人地址: US TN Oak Ridge
- 代理机构: Brinks Hofer Gilson & Lione
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01B11/02 ; G01N21/41 ; G01N21/43
摘要:
An optical system includes more than two optical interferometers that generate interference phenomena between optical waves to measure a plurality of distances, a plurality of thicknesses, and a plurality of indices of refraction of a sample. An electromagnetic detector receives an output of the optical interferometers to render a magnified image of at least a portion of the sample. A controller reduces or eliminates undesired optical signals through a hierarchical phase unwrapping of the output of the electromagnetic detector.
公开/授权文献
- US20100231918A1 Three wavelength quantitative imaging systems 公开/授权日:2010-09-16
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