发明授权
- 专利标题： Processing apparatus for processing object in vessel
- 专利标题（中）： 用于处理船舶物体的加工设备
-
申请号： US11193486申请日： 2005-08-01
-
公开(公告)号： US07978304B2公开(公告)日： 2011-07-12
- 发明人: Keiji Emoto
- 申请人： Keiji Emoto
- 申请人地址： JP
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP
- 代理机构： Rossi, Kimms & McDowell LLP
- 优先权： JP2003-064199 20030310
- 主分类号： G03B27/42
- IPC分类号： G03B27/42
摘要：
An apparatus for processing an object includes a vessel which forms a pressure-reduced inner space and accommodates the object, a member which is supported by an inner side of the vessel through a heat insulator, and a temperature adjusting portion which adjusts a temperature of the member.
公开/授权文献
- US20050280790A1 Processing apparatus for processing object in vessel 公开/授权日：2005-12-22
信息查询
