发明授权
- 专利标题： Spiral planar inductor and manufacturing method thereof
- 专利标题（中）： 螺旋平面电感器及其制造方法
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申请号： US12332720申请日： 2008-12-11
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公开(公告)号： US07977767B2公开(公告)日： 2011-07-12
- 发明人: Yutaka Nabeshima , Masaoki Kajiyama , Tomohiro Matsunaga , Hidenori Iwadate
- 申请人： Yutaka Nabeshima , Masaoki Kajiyama , Tomohiro Matsunaga , Hidenori Iwadate
- 申请人地址： JP Osaka
- 专利权人： Panasonic Corporation
- 当前专利权人： Panasonic Corporation
- 当前专利权人地址： JP Osaka
- 代理机构： McDermott Will & Emery LLP
- 优先权： JP2007-329205 20071220
- 主分类号： H01L27/00
- IPC分类号： H01L27/00
摘要：
An inductor includes an inductor wiring made of a metal layer and having a spiral planar shape. In a cross-sectional shape in a width direction of the inductor wiring, the inductor wiring has a larger film thickness at least in its inner side end than in its middle part.
公开/授权文献
- US20090160018A1 INDUCTOR AND MANUFACTURING METHOD THREOF 公开/授权日：2009-06-25
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