发明授权
- 专利标题: Configuration of high-voltage semiconductor power device to achieve three dimensional charge coupling
- 专利标题(中): 配置高压半导体功率器件实现三维电荷耦合
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申请号: US12660358申请日: 2010-02-24
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公开(公告)号: US07977740B2公开(公告)日: 2011-07-12
- 发明人: François Hébert , Tao Feng
- 申请人: François Hébert , Tao Feng
- 申请人地址: US CA Sunnyvale
- 专利权人: Alpha and Omega Semiconductor Incorporated
- 当前专利权人: Alpha and Omega Semiconductor Incorporated
- 当前专利权人地址: US CA Sunnyvale
- 代理商 Bo-In Lin
- 主分类号: H01L29/66
- IPC分类号: H01L29/66
摘要:
This invention discloses semiconductor device that includes a top region and a bottom region with an intermediate region disposed between said top region and said bottom region with a controllable current path traversing through the intermediate region. The semiconductor device further includes a trench with padded with insulation layer on sidewalls extended from the top region through the intermediate region toward the bottom region wherein the trench includes randomly and substantially uniformly distributed nano-nodules as charge-islands in contact with a drain region below the trench for electrically coupling with the intermediate region for continuously and uniformly distributing a voltage drop through the current path.
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