发明授权
US07977736B2 Vertical channel transistors and memory devices including vertical channel transistors 失效
垂直沟道晶体管和包括垂直沟道晶体管的存储器件

Vertical channel transistors and memory devices including vertical channel transistors
摘要:
A semiconductor device is provided which includes an NMOS vertical channel transistor located on a substrate and including a p+ polysilicon gate electrode surrounding a vertical p-channel region, and a PMOS vertical channel transistor located on the substrate and including an n+ polysilicon gate electrode surrounding a vertical n-channel region. The NMOS and PMOS vertical channel transistors are optionally operable in a CMOS operational mode.
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