发明授权
- 专利标题： Multilayer structure with zirconium-oxide tunnel barriers and applications of same
- 专利标题（中）： 多层结构与锆氧化物隧道屏障及其应用相同
-
申请号： US12126726申请日： 2008-05-23
-
公开(公告)号： US07977668B2公开(公告)日： 2011-07-12
- 发明人: Ivan Nevirkovets , John Ketterson , Oleksandr Chernyashevskyy , Serhii Shafraniuk
- 申请人： Ivan Nevirkovets , John Ketterson , Oleksandr Chernyashevskyy , Serhii Shafraniuk
- 申请人地址： US IL Evanston
- 专利权人： Northwestern University
- 当前专利权人： Northwestern University
- 当前专利权人地址： US IL Evanston
- 代理机构： Morris Manning Martin LLP
- 代理商 Tim Tingkang Xia, Esq.
- 主分类号： H01L29/72
- IPC分类号： H01L29/72
摘要：
A multilayer structure with zirconium-oxide tunnel barriers. In one embodiment, the multilayer structure includes a first niobium (Nb) layer, a second niobium (Nb) layer, and a plurality of zirconium-oxide tunnel barriers sandwiched between the first niobium (Nb) layer and the second niobium (Nb) layer, wherein the plurality of zirconium-oxide tunnel barriers is formed with N layers of zirconium-oxide, N being an integer greater than 1, and M layers of zirconium, M being an integer no less than N, such that between any two neighboring layers of zirconium-oxide, a layer of zirconium is sandwiched therebetween.
公开/授权文献
信息查询
IPC分类:
