发明授权
- 专利标题: Plasma ion source mass spectrometer
- 专利标题(中): 等离子体离子源质谱仪
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申请号: US12405378申请日: 2009-03-17
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公开(公告)号: US07977649B2公开(公告)日: 2011-07-12
- 发明人: Kazushi Hirano
- 申请人: Kazushi Hirano
- 申请人地址: US CA Santa Clara
- 专利权人: Agilent Technologies, Inc.
- 当前专利权人: Agilent Technologies, Inc.
- 当前专利权人地址: US CA Santa Clara
- 优先权: JP2008-115529 20080425
- 主分类号: H01J49/00
- IPC分类号: H01J49/00
摘要:
Provided is a plasma ion source mass spectrometer with an ion deflector lens having an improved removal ratio of photons and neutral particles as compared with the conventional art while an ion transmittance is maintained. The ion deflector includes an input side plate-like electrode, an output side plate-like electrode, and a tubular electrode disposed between the input side plate-like electrode and the output side plate-like electrode. The tubular electrode is of a point asymmetrical configuration. The tubular electrode is arranged so that a center axis of the tubular electrode is closer to an axis of travel of ions upstream of the input side plate-like electrode than an axis of travel of ions downstream of the output side plate-like electrode.
公开/授权文献
- US20090266984A1 Plasma Ion Source Mass Spectrometer 公开/授权日:2009-10-29
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