发明授权
- 专利标题: Radiant energy imager using null switching
- 专利标题(中): 辐射能量成像仪使用空切换
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申请号: US12189134申请日: 2008-08-08
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公开(公告)号: US07977635B2公开(公告)日: 2011-07-12
- 发明人: Oliver Edwards
- 申请人: Oliver Edwards
- 代理机构: Carr & Ferrell LLP
- 主分类号: G01J5/10
- IPC分类号: G01J5/10
摘要:
In some aspects, the present invention embodies both the method and apparatus for converting a pattern of irradiation to a visible image. An embodiment of the present invention provides an array of micro-electro-mechanical sensors with each sensor includes a deflectable micro-cantilever, responsive to absorbed incident radiation and to an applied repulsive electrostatic field. In an aspect, the sensor device also includes a null-sensing circuit coupled to a switch contact on or near the substrate, which senses when the micro-cantilever reaches its null location, by electrical connection with an upper switch contact on the micro-cantilever. Other embodiments are also described.
公开/授权文献
- US20110089324A1 RADIANT ENERGY IMAGER USING NULL SWITCHING 公开/授权日:2011-04-21
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