发明授权
US07977635B2 Radiant energy imager using null switching 有权
辐射能量成像仪使用空切换

  • 专利标题: Radiant energy imager using null switching
  • 专利标题(中): 辐射能量成像仪使用空切换
  • 申请号: US12189134
    申请日: 2008-08-08
  • 公开(公告)号: US07977635B2
    公开(公告)日: 2011-07-12
  • 发明人: Oliver Edwards
  • 申请人: Oliver Edwards
  • 代理机构: Carr & Ferrell LLP
  • 主分类号: G01J5/10
  • IPC分类号: G01J5/10
Radiant energy imager using null switching
摘要:
In some aspects, the present invention embodies both the method and apparatus for converting a pattern of irradiation to a visible image. An embodiment of the present invention provides an array of micro-electro-mechanical sensors with each sensor includes a deflectable micro-cantilever, responsive to absorbed incident radiation and to an applied repulsive electrostatic field. In an aspect, the sensor device also includes a null-sensing circuit coupled to a switch contact on or near the substrate, which senses when the micro-cantilever reaches its null location, by electrical connection with an upper switch contact on the micro-cantilever. Other embodiments are also described.
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