发明授权
- 专利标题: Method for producing a tuning-fork type crystal vibrating piece
- 专利标题(中): 音叉式水晶振动片的制造方法
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申请号: US11868323申请日: 2007-10-05
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公开(公告)号: US07975364B2公开(公告)日: 2011-07-12
- 发明人: Takehiro Takahashi
- 申请人: Takehiro Takahashi
- 申请人地址: JP Tokyo
- 专利权人: Nihon Dempa Kogyo Co., Ltd.
- 当前专利权人: Nihon Dempa Kogyo Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Woodcock Washburn LLP
- 优先权: JP2006-275192 20061006
- 主分类号: H04R31/00
- IPC分类号: H04R31/00
摘要:
A method for producing a tuning-fork type crystal vibrating piece relates to a crystal tuning fork comprising a basal portion, a first vibrating arm, and a second vibrating arm, wherein both arms extend from the basal portion. The method for producing a crystal tuning fork comprises a step of forming a first metallic film into a shape including the contours of the basal portion, the first vibrating arm and second vibrating arm on a first surface of a quartz wafer; a step of forming a second metallic film on the second surface opposite to the first surface of the quartz wafer into a shape covering at least a root area near the basal portion between the first vibrating arm and the second vibrating arm, and a step of wet-etching the quartz substrate in etching solution after forming the first and second metallic films.
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