Invention Grant
US07968406B2 Memory cells, methods of forming dielectric materials, and methods of forming memory cells
有权
记忆单元,介电材料的形成方法以及形成记忆单元的方法
- Patent Title: Memory cells, methods of forming dielectric materials, and methods of forming memory cells
- Patent Title (中): 记忆单元,介电材料的形成方法以及形成记忆单元的方法
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Application No.: US12351099Application Date: 2009-01-09
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Publication No.: US07968406B2Publication Date: 2011-06-28
- Inventor: D. V. Nirmal Ramaswamy , Noel Rocklein , Kyu S. Min
- Applicant: D. V. Nirmal Ramaswamy , Noel Rocklein , Kyu S. Min
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Some embodiments include memory cells. The memory cells may include a tunnel dielectric material, a charge-retaining region over the tunnel dielectric material, crystalline ultra-high k dielectric material over the charge-retaining region, and a control gate material over the crystalline ultra-high k dielectric material. Additionally, the memory cells may include an amorphous region between the charge-retaining region and the crystalline ultra-high k dielectric material, and/or may include an amorphous region between the crystalline ultra-high k dielectric material and the control gate material. Some embodiments include methods of forming memory cells which contain an amorphous region between a charge-retaining region and a crystalline ultra-high k dielectric material, and/or which contain an amorphous region between a crystalline ultra-high k dielectric material and a control gate material.
Public/Granted literature
- US20100176432A1 Memory Cells, Methods Of Forming Dielectric Materials, And Methods Of Forming Memory Cells Public/Granted day:2010-07-15
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