发明授权
US07965917B2 Illuminating apparatus and surface inspection system using illuminating apparatus 有权
照明装置和使用照明装置的表面检查系统

Illuminating apparatus and surface inspection system using illuminating apparatus
摘要:
At least one exemplary embodiment is directed to an illuminating apparatus, configured to uniformly illuminate a surface of an object, and includes a light-guiding member configured to guide light emitted from a source to a surface to be illuminated, and a reflecting member disposed between the light-guiding member and the surface to be illuminated. The reflecting member includes a pair of reflection surfaces disposed so as to face each other in a long side direction of the surface to be illuminated, and reflects light emitted from the light-guiding member in directions having directional components parallel to a short side direction of the surface to be illuminated toward the surface to be illuminated.
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