发明授权
- 专利标题: Illuminating apparatus and surface inspection system using illuminating apparatus
- 专利标题(中): 照明装置和使用照明装置的表面检查系统
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申请号: US11764555申请日: 2007-06-18
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公开(公告)号: US07965917B2公开(公告)日: 2011-06-21
- 发明人: Hiroshi Yoshikawa , Kenji Saitoh
- 申请人: Hiroshi Yoshikawa , Kenji Saitoh
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon USA Inc. IP Division
- 优先权: JP2006-170042 20060620
- 主分类号: G02B6/10
- IPC分类号: G02B6/10 ; G01N21/00 ; F21S6/00 ; F21V7/00
摘要:
At least one exemplary embodiment is directed to an illuminating apparatus, configured to uniformly illuminate a surface of an object, and includes a light-guiding member configured to guide light emitted from a source to a surface to be illuminated, and a reflecting member disposed between the light-guiding member and the surface to be illuminated. The reflecting member includes a pair of reflection surfaces disposed so as to face each other in a long side direction of the surface to be illuminated, and reflects light emitted from the light-guiding member in directions having directional components parallel to a short side direction of the surface to be illuminated toward the surface to be illuminated.
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