发明授权
- 专利标题: Two-axis magnetic field sensor with multiple pinning directions
- 专利标题(中): 具有多个钉扎方向的双轴磁场传感器
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申请号: US12117396申请日: 2008-05-08
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公开(公告)号: US07965077B2公开(公告)日: 2011-06-21
- 发明人: Bradley N. Engel , Phillip G. Mather , Jon M. Slaughter
- 申请人: Bradley N. Engel , Phillip G. Mather , Jon M. Slaughter
- 申请人地址: US AZ Chandler
- 专利权人: Everspin Technologies, Inc.
- 当前专利权人: Everspin Technologies, Inc.
- 当前专利权人地址: US AZ Chandler
- 代理机构: Ingrassia Fisher & Lorenz, P.C.
- 主分类号: G01R33/09
- IPC分类号: G01R33/09 ; H01L43/08 ; G01B7/14
摘要:
A fabrication process and apparatus provide a high-performance magnetic field sensor (200) from two differential sensor configurations (201, 211) which require only two distinct pinning axes (206, 216) which are formed from a single reference layer (60) that is etched into high aspect ratio shapes (62, 63) with their long axes drawn with different orientations so that, upon treating the reference layers with a properly aligned saturating field (90) and then removing the saturating field, the high aspect ratio patterns provide a shape anisotropy that forces the magnetization of each patterned shape (62, 63) to relax along its respective desired axis. Upon heating and cooling, the ferromagnetic film is pinned in the different desired directions.
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