发明授权
- 专利标题: Static eliminator
- 专利标题(中): 静电消除器
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申请号: US12323536申请日: 2008-11-26
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公开(公告)号: US07948733B2公开(公告)日: 2011-05-24
- 发明人: Tadashi Hashimoto
- 申请人: Tadashi Hashimoto
- 申请人地址: JP Osaka
- 专利权人: Keyence Corporation
- 当前专利权人: Keyence Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Smith Patent Office
- 优先权: JP2007-341094 20071228
- 主分类号: H01T23/00
- IPC分类号: H01T23/00
摘要:
There is provided a static eliminator for accurately detecting a contamination condition of a discharge electrode, in which a target value as a target frame ground current value is changed from, for example, zero as a reference alternately to the plus side and the minus side to such a degree as not to affect the ion balance of a workpiece, and the follow-up time, namely a phase delay, with respect to the change in target value differs depending on the contamination condition of the discharge electrode, and becomes longer with the progress of the contamination, and by use of this characteristic, a plurality of thresholds are prepared and compared with a detected frame ground current value, so as to detect the contamination condition of the discharge electrode.
公开/授权文献
- US20090168288A1 STATIC ELIMINATOR 公开/授权日:2009-07-02
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