发明授权
- 专利标题: Phase change tip storage cell
- 专利标题(中): 相变尖端存储单元
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申请号: US10732580申请日: 2003-12-10
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公开(公告)号: US07928420B2公开(公告)日: 2011-04-19
- 发明人: David V. Horak , Chung H. Lam , Hon-Sum P. Wong
- 申请人: David V. Horak , Chung H. Lam , Hon-Sum P. Wong
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Law Office of Charles W. Peterson, Jr.
- 代理商 Wan Yee Cheung, Esq.; Vazken Alexanian
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/06
摘要:
A storage cell, integrated circuit (IC) chip with one or more storage cells that may be in an array of the storage cells and a method of forming the storage cell and IC. Each storage cell includes a stylus, the tip of which is phase change material. The phase change tip may be sandwiched between an electrode and conductive material, e.g., titanium nitride (TiN), tantalum nitride (TaN) or n-type semiconductor. The phase change layer may be a chalcogenide and in particular a germanium (Ge), antimony (Sb), tellurium (Te) (GST) layer.
公开/授权文献
- US20050127349A1 Phase change tip storage cell 公开/授权日:2005-06-16
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