发明授权
US07925369B2 Method and apparatus for optimizing models for extracting dose and focus from critical dimension 有权
从关键维度优化提取剂量和重点的模型的方法和装置

Method and apparatus for optimizing models for extracting dose and focus from critical dimension
摘要:
A method includes defining a reference model of a system having a plurality of terms for modeling data associated with the system. A reference fit error metric is generated for the reference model. A set of evaluation models each having one term different than the reference model is generated. An evaluation fit error metric for each of the evaluation models is generated. The reference model is replaced with a selected evaluation model responsive to the selected evaluation model having an evaluation fit error metric less than the reference fit error metric. The model evaluation is repeated until no evaluation model has an evaluation fit error metric less than the reference fit error metric. The reference model is trained using the data associated with the system, and the trained reference model is employed to determine at least one characteristic of the system.
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