发明授权
US07924494B2 Apparatus and method for reducing slippage between structures in an interferometric modulator
有权
用于减少干涉式调制器中结构之间滑动的装置和方法
- 专利标题: Apparatus and method for reducing slippage between structures in an interferometric modulator
- 专利标题(中): 用于减少干涉式调制器中结构之间滑动的装置和方法
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申请号: US12631576申请日: 2009-12-04
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公开(公告)号: US07924494B2公开(公告)日: 2011-04-12
- 发明人: Ming-Hau Tung , Brian W. Arbuckle , Philip Don Floyd , William Cummings
- 申请人: Ming-Hau Tung , Brian W. Arbuckle , Philip Don Floyd , William Cummings
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人地址: US CA San Diego
- 代理机构: Knobbe Martens Olson & Bear LLP
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
A support structure within an interferometric modulator device may contact various other structures within the device. Increased bond strengths between the support structure and the other structures may be achieved in various ways, such as by providing roughened surfaces and/or adhesive materials at the interfaces between the support structures and the other structures. In an embodiment, increased adhesion is achieved between a support structure and a substrate layer. In another embodiment, increased adhesion is achieved between a support structure and a moveable layer. Increased adhesion may reduce undesirable slippage between the support structures and the other structures to which they are attached within the interferometric modulator.
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