发明授权
- 专利标题: Optical heterodyne fourier transform interferometer
- 专利标题(中): 光学外差傅里叶变换干涉仪
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申请号: US12219656申请日: 2008-07-25
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公开(公告)号: US07924430B2公开(公告)日: 2011-04-12
- 发明人: James A. Georges III
- 申请人: James A. Georges III
- 申请人地址: US VA Fairfax
- 专利权人: General Dynamics Advanced Information Systems
- 当前专利权人: General Dynamics Advanced Information Systems
- 当前专利权人地址: US VA Fairfax
- 代理机构: Ingrassia Fisher & Lorenz, P.C.
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
An interferometer and method for interferometric analysis are provided. The methodology includes generating first and second light beams from a light source, interacting the first light beam with an object under inspection, forming, from light emanating from the object under inspection in response to the interacting, an image of the light source on an image sensor, projecting the second light beam on the image on the image sensor, the combination of the light emanating from the object under inspection and the second light beam forming a collective image on the image sensor, applying a Fourier transform to the collective image formed on the image sensor, thereby forming a phase image, and isolating a wavefront map of the object under inspection from within the phase image.
公开/授权文献
- US20090027686A1 Optical heterodyne fourier transform interferometer 公开/授权日:2009-01-29
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