发明授权
- 专利标题： Information processing apparatus for interference signal processing
- 专利标题（中）： 用于干扰信号处理的信息处理装置
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申请号： US12032205申请日： 2008-02-15
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公开(公告)号： US07924426B2公开(公告)日： 2011-04-12
- 发明人: Tomoyuki Miyashita , Takahiro Matsumoto , Hideki Ina
- 申请人： Tomoyuki Miyashita , Takahiro Matsumoto , Hideki Ina
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Canon U.S.A., Inc., IP Division
- 优先权： JP2007-041277 20070221; JP2007-140863 20070528
- 主分类号： G01B11/02
- IPC分类号： G01B11/02 ; G01B9/02
摘要：
A shape measuring apparatus for measuring the shape of a measurement target surface includes an interferometer and computer. The interferometer senses interference light formed by measurement light from the measurement target surface and reference light by a photoelectric converter, while changing the light path length of the measurement light or the reference light. The computer Fourier-transforms a first interference signal sensed by the photoelectric converter to obtain a phase distribution and an amplitude distribution, shapes the amplitude distribution, inversely Fourier-transforms the phase distribution and the shaped amplitude distribution to obtain a second interference signal, and determines the shape of the measurement target surface based on the second interference signal.
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