发明授权
US07924018B2 MEMS electrometer that measures amount of repulsion of adjacent beams from each other for static field detection
有权
MEMS静电计，用于测量相邻光束相对于静态场检测的排斥量
- 专利标题： MEMS electrometer that measures amount of repulsion of adjacent beams from each other for static field detection
- 专利标题（中）： MEMS静电计，用于测量相邻光束相对于静态场检测的排斥量
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申请号： US12340055申请日： 2008-12-19
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公开(公告)号： US07924018B2公开(公告)日： 2011-04-12
- 发明人: Roger J. Peirce
- 申请人： Roger J. Peirce
- 申请人地址： US IL Glenview
- 专利权人： Illinois Tool Works Inc.
- 当前专利权人： Illinois Tool Works Inc.
- 当前专利权人地址： US IL Glenview
- 代理机构： Panitch Schwarze Belisario & Nadel LLP
- 主分类号： G01R29/12
- IPC分类号： G01R29/12
摘要：
An apparatus for detecting a static field includes a microelectromechanical systems (MEMS) device having two cantilevered beams of conductive material that are adjacent and substantially parallel to each other. The two beams repel each other in the presence of a static field. At least one sensor detects a respective amount of displacement of the two cantilevered beams from a rest position and determines an amount of repulsion of the two cantilevered beams from each other.
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