发明授权
US07923894B2 Actuator, image projection apparatus and production method for actuator
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执行机构,图像投影装置及执行机构的制作方法
- 专利标题: Actuator, image projection apparatus and production method for actuator
- 专利标题(中): 执行机构,图像投影装置及执行机构的制作方法
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申请号: US12447503申请日: 2007-12-03
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公开(公告)号: US07923894B2公开(公告)日: 2011-04-12
- 发明人: Hiroshi Obi , Hironori Tomita , Akira Kurozuka
- 申请人: Hiroshi Obi , Hironori Tomita , Akira Kurozuka
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Renner, Otto, Boisselle & Sklar, LLP
- 优先权: JP2006-327741 20061205
- 国际申请: PCT/JP2007/073329 WO 20071203
- 国际公布: WO2008/069176 WO 20080612
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; H02N1/00
摘要:
The present invention is directed to a bi-axial pivoting type actuator having a first movable section, a second movable section supporting the first movable section, and backlining. A first conductive portion and a second conductive portion for independently applying a driving voltage to each of the first movable section and the second movable section are provided on the second movable section, in a state of being split by isolation trenches and being stabilized by the backlining provided under the second movable section. By providing such backlining, mutual stabilization of the first conductive portion and the second conductive portion in an electrically isolated state, and simplification of the production steps for the actuator are realized. By providing a mirror on the first conductive portion of the actuator of the present invention as such, it becomes possible to provide a bi-axial pivoting type mirror device through a simple production process.
公开/授权文献
- US20100067078A1 ACTUATOR 公开/授权日:2010-03-18
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