发明授权
- 专利标题: Low-defect-density crystalline structure and method for making same
- 专利标题(中): 低缺陷密度晶体结构及其制备方法
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申请号: US11968544申请日: 2008-01-02
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公开(公告)号: US07923098B2公开(公告)日: 2011-04-12
- 发明人: Tetsuya Mishima , Madhavie Edirisooriya , Michael B. Santos
- 申请人: Tetsuya Mishima , Madhavie Edirisooriya , Michael B. Santos
- 申请人地址: US OK Norman
- 专利权人: The Board of Regents of the University of Oklahoma
- 当前专利权人: The Board of Regents of the University of Oklahoma
- 当前专利权人地址: US OK Norman
- 代理机构: Dunlap Codding, P.C.
- 主分类号: B32B7/02
- IPC分类号: B32B7/02 ; C30B19/00
摘要:
A low-defect-density crystalline structure comprising a first crystalline material, a layer of second crystalline material epitaxially grown on the first crystalline material, and a layer of third crystalline material epitaxially grown on the second layer such that the second layer is positioned between the first crystalline material and the third crystalline material. The second and third crystalline materials cooperate to form a desirable relationship. The crystalline structures of the second crystalline material and third crystalline material have a higher crystalline compatibility than the first crystalline material and third crystalline material. The layer of second crystalline material is sufficiently thick to form the desirable relationship with the third crystalline material but sufficiently thin for the layer of second crystalline material to be strained. The layer of third crystalline material is grown to a thickness beyond a thickness had the third layer been grown on an unstrained second layer.
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