发明授权
- 专利标题： Ink jet print head manufacturing method and ink jet print head
- 专利标题（中）： 喷墨打印头制造方法和喷墨打印头
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申请号： US11935136申请日： 2007-11-05
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公开(公告)号： US07922922B2公开(公告)日： 2011-04-12
- 发明人: Masaya Uyama
- 申请人： Masaya Uyama
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2006-313400 20061120
- 主分类号： G11B5/127
- IPC分类号： G11B5/127 ; G01D15/00 ; C03C15/00 ; C23F1/00
摘要：
An object of this invention is to provide a manufacturing method that, by using a general-purpose semiconductor fabrication process, can easily manufacture an ink jet print head in which energy generating elements are complicatedly installed in the ink path. To this end, the present invention comprising steps of providing a substrate having a removal projected portion, forming an energy generating element along the projected portion, forming a supporting member on the energy generating element, and forming a ink chamber by removing the projected portion from the substrate.
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