发明授权
- 专利标题： Production apparatus and method of producing a light-emitting device by using the same apparatus
- 专利标题（中）： 通过使用相同的装置制造发光装置的制造装置和方法
-
申请号： US12576694申请日： 2009-10-09
-
公开(公告)号： US07922554B2公开(公告)日： 2011-04-12
- 发明人: Shunpei Yamazaki , Takashi Hamada , Satoshi Seo
- 申请人： Shunpei Yamazaki , Takashi Hamada , Satoshi Seo
- 申请人地址： JP
- 专利权人： Semiconductor Energy laboratory Co., Ltd.
- 当前专利权人： Semiconductor Energy laboratory Co., Ltd.
- 当前专利权人地址： JP
- 代理机构： Husch Blackwell LLP
- 优先权： JP2002-200379 20020709
- 主分类号： H01J9/00
- IPC分类号： H01J9/00
摘要：
The present invention relates to a method for manufacturing a light-emitting device. At least one of a light-emitting film forming step, a conductive film forming step and an insulating film forming step is carried out while holding a substrate in a manner that an angle subtended by a surface of the substrate and the direction of gravity is within a range of from 0 to 30°.
公开/授权文献
信息查询
