发明授权
- 专利标题: Transistor with reduced charge carrier mobility
- 专利标题(中): 具有降低的载流子迁移率的晶体管
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申请号: US11764500申请日: 2007-06-18
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公开(公告)号: US07915681B2公开(公告)日: 2011-03-29
- 发明人: Jörg Berthold , Christian Pacha , Klaus von Arnim
- 申请人: Jörg Berthold , Christian Pacha , Klaus von Arnim
- 申请人地址: DE Neubiberg
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Neubiberg
- 代理机构: Infineon Technologies
- 代理商 Philip H. Schlazer
- 主分类号: H01L27/01
- IPC分类号: H01L27/01
摘要:
A device includes a first transistor including a fin and a second transistor including a fin, the fin of the first transistor having a lower charge carrier mobility than the fin of the second transistor. In a method, the fin of the first transistor is treated to have a lower charge carrier mobility than the fin of the second transistor.
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