发明授权
US07915586B2 Method for performing mid-IR spectroscopy measurements to measure film coating thickness, weight and/or film composition
有权
用于进行中红外光谱测量以测量膜涂层厚度,重量和/或膜组成的方法
- 专利标题: Method for performing mid-IR spectroscopy measurements to measure film coating thickness, weight and/or film composition
- 专利标题(中): 用于进行中红外光谱测量以测量膜涂层厚度,重量和/或膜组成的方法
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申请号: US12189045申请日: 2008-08-08
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公开(公告)号: US07915586B2公开(公告)日: 2011-03-29
- 发明人: Paul H. Shelley , Gregory J. Werner
- 申请人: Paul H. Shelley , Gregory J. Werner
- 申请人地址: US IL Chicago
- 专利权人: The Boeing Company
- 当前专利权人: The Boeing Company
- 当前专利权人地址: US IL Chicago
- 代理机构: Tung & Associates
- 主分类号: G01N21/35
- IPC分类号: G01N21/35
摘要:
A method of determining a film coating thickness on a substrate and/or amount one or more compositional ingredients of said film coating including making mid-IR spectra of a series of coating thickness or coating weight standards (and/or composition standards) on an appropriate substrate material to match sample material in question, pre-processing the data to prepare it for multivariate calibration methods, performing the multivariate calibration, saving the calibration model in the hand-held mid-IR device in an appropriate format, and using the calibration model to predict sample material in question from their mid IR spectra.
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