发明授权
- 专利标题: Manufacturing method of optical waveguide device and optical waveguide device obtained thereby
- 专利标题(中): 由此获得的光波导器件和光波导器件的制造方法
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申请号: US12266120申请日: 2008-11-06
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公开(公告)号: US07912332B2公开(公告)日: 2011-03-22
- 发明人: Masayuki Hodono
- 申请人: Masayuki Hodono
- 申请人地址: JP Ibaraki-shi, Osaka
- 专利权人: Nitto Denko Corporation
- 当前专利权人: Nitto Denko Corporation
- 当前专利权人地址: JP Ibaraki-shi, Osaka
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP
- 优先权: JP2007-288397 20071106
- 主分类号: G02B6/26
- IPC分类号: G02B6/26 ; G02B6/42 ; G02B6/30
摘要:
A manufacturing method of an optical waveguide device which is capable of easily and precisely aligning the optical axis of a light receiving and emitting element and the optical axis of an optical waveguide and capable of shortening manufacturing time, and to provide an optical waveguide device obtained thereby. An under cladding layer 11 is formed on an upper surface of a substrate 10. A core layer 16 is formed on an upper surface of the under cladding layer 11. Horizontal alignment guides 17 made of the same material as the above-mentioned core layer 16 are formed on the above-mentioned substrate 10. A light emitting element 19 is installed on the substrate 10 along the horizontal alignment guides 17.
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