发明授权
US07912332B2 Manufacturing method of optical waveguide device and optical waveguide device obtained thereby 失效
由此获得的光波导器件和光波导器件的制造方法

Manufacturing method of optical waveguide device and optical waveguide device obtained thereby
摘要:
A manufacturing method of an optical waveguide device which is capable of easily and precisely aligning the optical axis of a light receiving and emitting element and the optical axis of an optical waveguide and capable of shortening manufacturing time, and to provide an optical waveguide device obtained thereby. An under cladding layer 11 is formed on an upper surface of a substrate 10. A core layer 16 is formed on an upper surface of the under cladding layer 11. Horizontal alignment guides 17 made of the same material as the above-mentioned core layer 16 are formed on the above-mentioned substrate 10. A light emitting element 19 is installed on the substrate 10 along the horizontal alignment guides 17.
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