发明授权
- 专利标题： Three-stage formation of thin-films for photovoltaic devices
- 专利标题（中）： 用于光伏器件的三阶段薄膜形成
-
申请号： US12603285申请日： 2009-10-21
-
公开(公告)号： US07910396B2公开(公告)日： 2011-03-22
- 发明人: Sergey Frolov , Allan James Bruce , Michael Cyrus
- 申请人： Sergey Frolov , Allan James Bruce , Michael Cyrus
- 申请人地址： US NJ South Plainfield
- 专利权人： Sunlight Photonics, Inc.
- 当前专利权人： Sunlight Photonics, Inc.
- 当前专利权人地址： US NJ South Plainfield
- 代理机构： Mayer & Williams PC
- 代理商 Stuart H. Mayer
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A method for producing a film of compound semiconductor includes providing a substrate and a compound bulk material having a first chemical composition that includes at least one first chemical element and a second chemical element. A film is deposited on the substrate using the compound bulk material as a single source of material. The deposited film has a composition substantially the same as the first chemical composition. A residual chemical reaction is induced in the deposited film using a source containing the second chemical element to thereby increase the content of the second chemical element in the deposited film so that the deposited film has a second chemical composition. The film may be employed in a photovoltaic device.
公开/授权文献
信息查询
IPC分类:
