发明授权
US07898371B2 Electromechanical switch with partially rigidified electrode 有权
具有部分硬化电极的机电开关

Electromechanical switch with partially rigidified electrode
摘要:
An electromechanical switch with a rigidified electrode includes an actuation electrode, a suspended electrode, a contact, and a signal line. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the actuation electrode and includes a rigidification structure. The contact is mounted to the suspended electrode. The signal line is positioned proximate to the suspended electrode to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the suspended electrode.
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