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US07895885B2 Method and system for nanoknife and MEMS platform 有权
nanoknife和MEMS平台的方法和系统

Method and system for nanoknife and MEMS platform
摘要:
Methods and systems for constructing microfabricated devices including a microknife and methods and devices for a three-dimensional microstructure constructed from a plurality of separable planar components using one or more microfabrication techniques and optionally using one or more interlock structures.
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