发明授权
- 专利标题： Micro movable element and micro movable element array
- 专利标题（中）： 微动元件和微动元件阵列
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申请号： US12761123申请日： 2010-04-15
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公开(公告)号： US07893596B2公开(公告)日： 2011-02-22
- 发明人: Osamu Tsuboi , Norinao Kouma , Yoshihiro Mizuno , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto
- 申请人： Osamu Tsuboi , Norinao Kouma , Yoshihiro Mizuno , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto
- 申请人地址： JP Kanagawa
- 专利权人： Fujitsu Limited
- 当前专利权人： Fujitsu Limited
- 当前专利权人地址： JP Kanagawa
- 代理机构： Arent Fox LLP
- 主分类号： H02N2/00
- IPC分类号： H02N2/00
摘要：
A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion (22c) electrically connected to the first driving electrode, a second conductor portion (22b) electrically connected to the second driving electrode, and a third conductor portion (21a) which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion (22c) via an insulating film (23) and bonded to the second conductor portion (22b) via the insulating film (23).
公开/授权文献
- US20100194235A1 MICRO MOVABLE ELEMENT AND MICRO MOVABLE ELEMENT ARRAY 公开/授权日：2010-08-05
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